JPS6179535U - - Google Patents

Info

Publication number
JPS6179535U
JPS6179535U JP16430384U JP16430384U JPS6179535U JP S6179535 U JPS6179535 U JP S6179535U JP 16430384 U JP16430384 U JP 16430384U JP 16430384 U JP16430384 U JP 16430384U JP S6179535 U JPS6179535 U JP S6179535U
Authority
JP
Japan
Prior art keywords
cradle
carrier
semiconductor material
wall portion
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16430384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452993Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984164303U priority Critical patent/JPH0452993Y2/ja
Publication of JPS6179535U publication Critical patent/JPS6179535U/ja
Application granted granted Critical
Publication of JPH0452993Y2 publication Critical patent/JPH0452993Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1984164303U 1984-10-30 1984-10-30 Expired JPH0452993Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984164303U JPH0452993Y2 (en]) 1984-10-30 1984-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984164303U JPH0452993Y2 (en]) 1984-10-30 1984-10-30

Publications (2)

Publication Number Publication Date
JPS6179535U true JPS6179535U (en]) 1986-05-27
JPH0452993Y2 JPH0452993Y2 (en]) 1992-12-14

Family

ID=30722166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984164303U Expired JPH0452993Y2 (en]) 1984-10-30 1984-10-30

Country Status (1)

Country Link
JP (1) JPH0452993Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013135127A (ja) * 2011-12-27 2013-07-08 Shindengen Electric Mfg Co Ltd クレイドル、半導体ウェーハの水切り方法及び半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660596A (en) * 1979-10-23 1981-05-25 Mitsubishi Electric Corp Centrifugal hydroextractor
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660596A (en) * 1979-10-23 1981-05-25 Mitsubishi Electric Corp Centrifugal hydroextractor
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013135127A (ja) * 2011-12-27 2013-07-08 Shindengen Electric Mfg Co Ltd クレイドル、半導体ウェーハの水切り方法及び半導体装置

Also Published As

Publication number Publication date
JPH0452993Y2 (en]) 1992-12-14

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